Wafer processing system
US4705951A · kind A · utility
142Cited by
11References
16Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Apr 17, 1986 |
| Grant date | Nov 10, 1987 |
| Priority date | — |
| Expiry date | Apr 17, 2006 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S414/139
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A wafer processing system including wafer handling arms incorporated into vacuum isolation valves is described. A loadlock with elevator and optical sensors is used to inventory and position a cassette of wafers. The wafers in the cassette can be randomly accessed. A computer is used to control the system according to a task status table independent of time sequence.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.