Patent · US Expired

Method and apparatus for automatically positioning a particle beam

US4705954A · kind A · utility

4Cited by

5References

7Claims

0Family size

Assignee

Siemens Aktiengesellschaft · DE

Inventors

Peter Rummel · Festenbach, DE
Eckhard Wolfgang · Munich, DE

Key dates

Filing date	Aug 19, 1985
Grant date	Nov 10, 1987
Priority date	—
Expiry date	Aug 19, 2005

Classification

Technology area (CPC H)Electricity
CPC primaryH01J37/3045
WIPO fieldElectrical machinery, apparatus, energy
WIPO sectorElectrical engineering

Abstract

A particle probe is positioned to a specific region when an actual position of the specific region appears shifted relative to its rated position due to local fields, and can therefore not be defined with high precision. The particle probe is positioned to a prescribed region. The particle probe is then deflected in the environment of this region such that the particle probe impinges different regions at the prescribed region. The position of the specific region is determined from the measured signals which are triggered given incidence of the particle probe on the different regions. The particle probe is then positioned to the specific region. An electrical line may form a test spot at the specific region wherein one dimension thereof is greater than a width thereof.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.