Composition sensor with minimal non-linear thermal gradients
US4706061A · kind A · utility
29Cited by
10References
9Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Aug 28, 1986 |
| Grant date | Nov 10, 1987 |
| Priority date | — |
| Expiry date | Aug 28, 2006 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T428/24926
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A gaseous composition sensor which is a microstructure device comprising a heated planar thin film diaphragm sensor member suspended over a shallow flat bottomed etched pit in a single crystal silicon substrate.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.