Three dimensional position measurement system using an interferometer
US4707129A · kind A · utility
57Cited by
4References
13Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | May 10, 1985 |
| Grant date | Nov 17, 1987 |
| Priority date | — |
| Expiry date | May 10, 2005 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01B9/0207
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An interferometer having a beam generating section and a reflecting section. Mechanisms are provided to direct a beam from the generating section to the reflecting section even when the reflecting section moves freely in three dimensions. Mechanisms are also provided to direct the beam back from the reflecting section to the generating section even when the reflecting section moves freely in three dimensions. A method is presented that enables the absolute distance between the generating and reflecting sections to be determined.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.