Method and apparatus for high pressure testing of solid state pressure sensors
US4708012A · kind A · utility
14Cited by
3References
9Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Aug 19, 1986 |
| Grant date | Nov 24, 1987 |
| Priority date | — |
| Expiry date | Aug 19, 2006 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T29/49007
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A method of testing the diaphragm portion of the die before the pressure sensor is assembled is disclosed. A mechanical pressure is exerted upon the diaphragm equivalent to any desired atmospheric pressure. The electrical output of the die is then measured to determine if it is within an acceptable range. If the electrical output is not within the acceptable range the resistors of the die can be trimmed at that time, prior to assembly.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.