Storage box
US4709834A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Feb 2, 1987 |
| Grant date | Dec 1, 1987 |
| Priority date | — |
| Expiry date | Feb 2, 2007 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/67373
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
Storage box including a box, a box door, a spring biased wafer retainer, and two locking clips. The storage box is used with standard mechanical interface (SMIF) transfer equipment, and is sealable, dust proof, and stackable. The box door includes cross-bar locators for cross-bar wafer cassettes. The box door will also accept other types of wafer processing cassettes. Each of the locking clips engage into a clip enclosure outboard of the box, and includes a locking slot for the locking clip, as well as a latch pin opening which provides for movement of the latch pin. A spring bar including parallel contact bars and configured spring bar ends positions to secure wafers in a contained wafer processing cassette.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.