Pressure transducer package
US4710744A · kind A · utility
Assignee
Inventor
Key dates
| Filing date | Apr 8, 1985 |
| Grant date | Dec 1, 1987 |
| Priority date | — |
| Expiry date | Apr 8, 2005 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01L19/0084
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Disclosed is a pressure transducer package comprising a housing and a substantially cylindrical chamber formed into the housing, a first end of the chamber comprising a substantially flat surface. The package further comprises a substantially cylindrical interface plate having first and second substantially flat end surfaces, one end surface of the interface plate facing the first end surface of the chamber. The package further comprises a pressure transducer comprising a pressure sensitive silicon die mounted to a substantially cylindrical support member. The support member comprises first and second substantially flat end surfaces. The other end surface of the interface plate faces one end surface of the support member. The housing comprises plug apparatus for hermetically sealing the chamber, the plug apparatus having a substantially flat surface forming a second end of the chamber. A compressive ring is located between the other end of the support member and the substantially flat surface of the plug apparatus. The plug apparatus comprises means for compressing the interface plate, pressure transducer, and compressive ring together and toward the first end of the chamber. The h…
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.