Pressure measuring element

US4711130A · kind A · utility

Assignee

• Robert Bosch GmbH · DE

Inventors

• Hans J. Glas · Tamm, DE
• Hans Hecht · Stuttgart, DE
• Klaus Muller · Tamm, DE
• Kurt Spitzenberger · Laichingen, DE
• Gunther Stecher · Ludwigsburg, DE

Key dates

• Filing date: Jun 30, 1986
• Grant date: Dec 8, 1987
• Expiry date: Jun 30, 2006

Classification

• Technology area (CPC G): Physics
• CPC primary: G01L9/0075
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

A pressure measuring element includes a plate-shaped substrate of ceramic material and a membrane deformable in response to pressure fluctuations. The membrane is made of ceramic material and is mounted to the upper side of the substrate. A pressure-sensitive resistor for measuring pressure is positioned inside the membrane. A heating resistor element is positioned on the underside of the substrate, which maintains the temperature of the substrate constant. A temperature sensor is also arrayed on the upper side of the substrate near the membrane.