Mask holding
US4711438A · kind A · utility
16Cited by
5References
2Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | May 8, 1986 |
| Grant date | Dec 8, 1987 |
| Priority date | — |
| Expiry date | May 8, 2006 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/682
- WIPO fieldMachine tools
- WIPO sectorMechanical engineering
Abstract
A rectangular plate holder is formed with an approximately square recess defined by an upstanding perimetrical wall having two top studs on one side and one top stud on an opposed side wall lapped to be coplanar in a common plane. The base plates include five and three sets of mask clamping points for defining clamping points for five and three mask sizes. Each clamp includes a clamp assembly fastened to the base having a spring-loaded lower clamping arm below an upper set screw clamping point. A handle is fixed to one side between the opposed sides having the lapped studs.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.