Gas sensor and method of producing the same
US4713646A · kind A · utility
Assignees
Inventors
Key dates
| Filing date | Jun 24, 1985 |
| Grant date | Dec 15, 1987 |
| Priority date | — |
| Expiry date | Jun 24, 2005 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T29/49002
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A gas sensor includes a pair of electrodes printed on an electrically insulating substrate, a sensitive layer deposited on tip portions of the electrodes and a part of the substrate adjacent to the tip portions and bridging the space between the electrodes at the tip portion, and a protective film deposited on the electrodes and a part of the substrate adjacent to the tip portion so that a part of each electrode covered with the sensitive layer is free of the protective film. The sensitive layer is formed by depositing titanium oxide by plasma spraying on the substrate, and then heat-treating the deposited titanium oxide, so as to provide a diffusion reactive layer between the sensitive layer and the substrate and to form fine grooves on the surface of the sensitive layer.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.