Grip device for sheet-like objects
US4715637A · kind A · utility
52Cited by
0References
24Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Apr 17, 1986 |
| Grant date | Dec 29, 1987 |
| Priority date | — |
| Expiry date | Apr 17, 2006 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S414/141
- WIPO fieldHandling
- WIPO sectorMechanical engineering
Abstract
A gripping device for gripping an outer peripheral edge of an object to be grasped such as, for example, a semiconductor wafer, with the gripping device including a base, gripping members for gripping the object to be grasped, elastic members disposed between the base and the grip members so as to urge the respective grip members in an opening or closing direction. A driver for the grip members is provided, with the driver being fashioned as a linear or flat shape memory alloy member which is connected across the grip members.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.