Ion beam generator
US4716295A · kind A · utility
2Cited by
8References
36Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Oct 1, 1985 |
| Grant date | Dec 29, 1987 |
| Priority date | — |
| Expiry date | Oct 1, 2005 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J27/24
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
An ion beam generator having an ion generating section for generating ions where the material to be ionized is introduced and a light source for introducing a light into the ion generating sections. This light has a wavelength such that it excites the material to be ionized to the intermediate state from the ground state of the material by a resonance excitation. The specific material to be taken out as an ion beam is selectively ionized through the intermediate state.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.