Method of manufacturing a magnetic thin film
US4717584A · kind A · utility
32Cited by
4References
11Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Feb 5, 1986 |
| Grant date | Jan 5, 1988 |
| Priority date | — |
| Expiry date | Feb 5, 2006 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01F41/22
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
An organic metal compound containing elements constituting a magnetic material and an oxygen gas are introduced into plasmas at a low pressure and a thin film of magnetic oxide is prepared on an organic film or aluminum at low temperature.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.