Patent · US Expired

Container for the storage and shipment of silicon disks or wafers

US4718549A · kind A · utility

40Cited by
11References
21Claims
0Family size

Assignee

Inventors

Key dates

Filing dateMar 10, 1986
Grant dateJan 12, 1988
Priority date
Expiry dateMar 10, 2006

Classification

  • Technology area (CPC Y)Emerging Cross-Sectional Technologies
  • CPC primaryY10S206/832
  • WIPO fieldSemiconductors
  • WIPO sectorElectrical engineering

Abstract

A container for the storage and shipment of silicon wafers has three parts; namely: PA0 (1) a lower box half, PA0 (2) an upper box half or a lid which, when joined together, forms an external protective box-like receptacle of the container, and PA0 (3) a cassette having ribs defining seats for accommodating the silicon wafers arranged in the interior of the box-like receptacle. The two box halves are closed in a shape-mating, releasable fashion and can be fixedly clamped together with the cassette by restraining action of a lock arrangement. Additional auxiliary ribs are provided at the upper box half to effect a fixed clamping of the cassette and to retain the silicon wafers in the grooves or seats of the cassette. Guide rails are arranged in the box halves to engage the cassette and prevent movement within the box-like receptacle.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.