High speed circuit measurements using photoemission sampling
US4721910A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Sep 12, 1986 |
| Grant date | Jan 26, 1988 |
| Priority date | — |
| Expiry date | Sep 12, 2006 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01R31/308
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Apparatus for measuring the voltage waveform on the metallization lines of an integrated circuit is described. Short high powered pulses of light are coupled from a laser and focused on the metallization line of the integrated circuit which is coupled to receive a voltage waveform that is synchronized to the output laser pulses. Electrons are emitted from the metallization line due to the multiphoton photoelectronic effect induced by the pulses of light. An electron energy analyzer having a uniform extraction grid as its most remote element is positioned with the extraction grid as close as possible to the integrated circuit and the laser pulses are focused through one of the holes of this uniform grid. An output circuit is connected in a feedback arrangement which receives the output pulses of the energy analyzer and develops a voltage on a second uniform grid called the retarding grid that is positioned a predetermined distance from the extraction grid inside the electron energy analyzer. A sinusoidal voltage is superimposed on the signal provided to the retarding grid in order to eliminate the effect of noise components in the amplitude of the laser pulses.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.