Patent · US Expired

Method of manufacturing a semiconductor device

US4722130A · kind A · utility

68Cited by
9References
4Claims
0Family size

Assignee

Inventors

Key dates

Filing dateFeb 17, 1987
Grant dateFeb 2, 1988
Priority date
Expiry dateFeb 17, 2007

Classification

  • Technology area (CPC Y)Emerging Cross-Sectional Technologies
  • CPC primaryY10T29/4981
  • WIPO fieldSemiconductors
  • WIPO sectorElectrical engineering

Abstract

Disclosed is a method of manufacturing a semiconductor device which comprises the step of forming grooves in the form of a grid on the upper surface of a semiconductor wafer formed with elements, the step of grinding or polishing the underside of the semiconductor wafer to thereby reduce the thickness thereof, the step of applying a first single-sided, self-adhesive sheet onto the underside of the semiconductor wafer, and the step of stretching the second single-sided, self-adhesive sheet so as to space out each other a multiplicity of semiconductor chips divided along the gridlike grooves of the semiconductor wafer. Each semiconductor chip is picked up and mounted on a lead frame.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.