High pressure sensor

US4722227A · kind A · utility

Assignee

• Robert Bosch GmbH · DE

Inventors

• Alfred Grob · Oberstenfeld, DE
• Wolfgang Leibfried
• Karl Rampmaier · Stuttgart, DE
• Kurt Spitzenberger · Laichingen, DE
• Gunther Stecher · Ludwigsburg, DE
• Klaus Steinle · Sindelfingen, DE
• Heinz Walter · Hergatz, DE
• Herbert Zimmermann · Freiberg am Neckar, DE

Key dates

• Filing date: Apr 22, 1986
• Grant date: Feb 2, 1988
• Expiry date: Apr 22, 2006

Classification

• Technology area (CPC G): Physics
• CPC primary: G01L9/0002
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

The high pressure sensor includes a housing part, a lid closing the same and an intermediary disposed sensor disk. A cylindrical pressure chamber is formed in the housing, wherein an inner area of the sensor disk is disposed in a sealed off manner. In this area the measuring sensors are disposed in form of piezoresistive layer resistors. Layer conductors penetrate from this inner area into an outer area, wherein evaluation circuits and the evaluation electronic are disposed. The total sensor disk is provided with one or a plurality of glass layers in such a manner that a flat surface is obtained. Pressure changes of the pressure medium are picked up in the pressure chamber by the measuring sensors and are processed accordingly. Such a high pressure sensor is relatively simple and advantageous in its use.