Method of producing multilayer coatings on a substrate
US4724169A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Jun 24, 1986 |
| Grant date | Feb 9, 1988 |
| Priority date | — |
| Expiry date | Jun 24, 2006 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC23C28/00
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
Multilayer protective coatings that are applied over a substrate that comprise a plurality of superimposed multilayer units and methods of making the coatings are disclosed. Each multilayer unit contains two or more superimposed thin layers in which at least two layers are compositionally different. The properties of the resulting coating are a combination of the properties of the individual layers. One layer of a multilayer unit may provide hardness or wear resistance and another layer may provide lubricity, for example. The thickness of the individual layers can be related to the microscopic surface relief of the substrate to which the protective coating is applied. One disclosed multilayer unit comprises three layers: an oxidation resistant layer; a nitride layer; and a layer of disordered boron and carbon material. A method of making the multilayer coatings is provided that includes depositing over a substrate a plurality of superimposed multilayer units. The deposition may be accomplished by sputtering, for example.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.