Method of observing the arrangement of atoms on a surface and apparatus therefor
US4724320A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Sep 25, 1985 |
| Grant date | Feb 9, 1988 |
| Priority date | — |
| Expiry date | Sep 25, 2005 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N23/225
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A method for observing the arrangement of atoms in a thin layer on a surface and an apparatus for employing the method are disclosed. According to the method, a finely converged electron beam is directed to a surface of a sample and the X-ray emitted from the surface is detected at a take-off angle equivalent to, or in the vicinity of, the total reflection angle, thereby avoiding interference from X-rays emitted beneath the surface. The apparatus includes an electron gun, a sample holding means, one or more detectors and devices for storing, processing and displaying the output signal from the detectors. The apparatus also provides for two-dimensional scanning of a surface and for adjustment of the position of the sample and of the detectors.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.