Vaporization arrangement with a rectangular vaporization crucible and several electron guns

US4724796A · kind A · utility

Assignee

• Leybold-Heraeus GmbH · DE

Inventors

• Horst Ranke · Alzenau, DE
• Volker Bauer · Neuberg, DE
• Albert Feuerstein · Neuberg, DE
• Walter Dietrich · Yorktown Heights, US

Key dates

• Filing date: Dec 15, 1986
• Grant date: Feb 16, 1988
• Expiry date: Dec 15, 2006

Classification

• Technology area (CPC C): Chemistry; Metallurgy
• CPC primary: C23C14/30
• WIPO field: Electrical machinery, apparatus, energy
• WIPO sector: Electrical engineering

Abstract

A vaporization arrangement for coating substrates disposed in an areal region, or past through an areal region, comprises a rectangular vaporization crucible with a crucible rim, as well as plurality of electron guns each having an X-Y deflecting system. The electron guns are disposed on one side of the drucible axis separately from the crucible in such a manner that their beam axis extend parallel to one another and are directed on a plane passing vertically through the longitudinal axis of the crucible. The arrangement further comprises means for deflecting the electron means onto the surface of the contents of the crucible. Such means include an alternating serial arrangement of linear coils, on the side of the crucible opposite to the electron guns, and pole plates disposed both between the linear coils and at their ends. The pole plates at the ends of a linear coil in each case assume such a position relative to an opposite electron gun, such that the beam axis is substantially in a perpendicular plane of symmetry between the pole plates.