Multi-layered anti-reflection coating
US4726654A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Nov 17, 1986 |
| Grant date | Feb 23, 1988 |
| Priority date | — |
| Expiry date | Nov 17, 2006 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B1/115
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A multi-layered anti-reflection coating is provided having six or seven layers. The design can be defined by the following parameters: ______________________________________ N.sub.1 < 1.5 N.sub.1 d.sub.1 = 0.25.lambda..sub.0 N.sub.2 > 1.8 0.11.lambda..sub.0 < N.sub.2 d.sub.2 < 0.19.lambda..sub.0 N.sub.3 < 1.7 0.02.lambda..sub.0 < N.sub.3 d.sub.3 < 0.08.lambda..sub.0 N.sub.4 > 1.8 0.12.lambda..sub.0 < N.sub.4 d.sub.4 < 0.23.lambda..sub.0 N.sub.5 > 1.5 0.28.lambda..sub.0 < N.sub.5 d.sub.5 < 0.36.lambda..sub.0 N.sub.6 < 1.5 0.04.lambda..sub.0 < N.sub.6 d.sub.6 < 0.14.lambda..sub.0 N.sub.7 > 1.5 0 .ltoreq. N.sub.7 d.sub.7 < 0.55.lambda..sub.0 N.sub.4 > N.sub.5 > N.sub.6 ______________________________________ wherein N refers to the refractive index, d refers to the physical thickness with their respective subnumbers referring to the layer, with the first layer being the layer furthest from the substrate, and .lambda..sub.0 refers to a preselected design wavelength.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.