Method of producing diamond-like carbon-coatings

US4728529A · kind A · utility

Assignee

• Battelle Institute e.V. · DE

Inventors

• Heinz-Werner Etzkorn · Neu-Anspach, DE
• Werner Ronge · Mörfelden, DE

Key dates

• Filing date: Dec 13, 1985
• Grant date: Mar 1, 1988
• Expiry date: Dec 13, 2005

Classification

• Technology area (CPC C): Chemistry; Metallurgy
• CPC primary: C03C2218/153
• WIPO field: Optics
• WIPO sector: Instruments

Abstract

Diamond-like, transparent, clear and uncolored carbon coatings with low internal stresses are generated on substrates by plasma discharge from the gas phase. For this purpose, a hydrocarbon gas or a mixture of hydrocarbon gases and pure hydrogen is admitted onto the substrate to be coated which is at room temperature. Around the substrate an oxygen-free plasma discharge is produced by high-frequency excitation which is sustained by the gases admitted. The gases are excited, dissociated ionized and accelerated toward the substrate during plasma discharge.