Photosensitive composition with azide or bisazide compound with oxazolone group
US4728594A · kind A · utility
5Cited by
9References
6Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jan 14, 1986 |
| Grant date | Mar 1, 1988 |
| Priority date | — |
| Expiry date | Jan 14, 2006 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S430/128
- WIPO fieldOrganic fine chemistry
- WIPO sectorChemistry
Abstract
A photosensitive composition comprising an azide compound represented by the formula: ##STR1## wherein each of X and Y is an aromatic substituent group, at least one of X and Y being an aromatic substituent group having an azide group, and n and m are zeros or integers of 1, and a polymeric compound. Since this composition has high resolution and is photosensitive to light having a wavelength of 436 nm, it permits employment of a reduction projection printer and is suitable for fabrication of semiconductor devices.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.