Electron-beam probing of photodiodes
US4730158A · kind A · utility
86Cited by
2References
20Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jun 6, 1986 |
| Grant date | Mar 8, 1988 |
| Priority date | — |
| Expiry date | Jun 6, 2006 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY02E10/50
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Method and apparatus for testing photodiode arrays using an electron beam. The diodes are charged at successive intervals over the RC time constant curve to develop successively increasing voltages at the ends of succeeding time intervals. Diode voltage and current are measured at the end of each interval and the resulting data are used to develop a current-voltage characteristic for each diode.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.