Patent · US Expired

Coaxial probe card

US4731577A · kind A · utility

127Cited by
9References
9Claims
0Family size

Inventor

Key dates

Filing dateMar 5, 1987
Grant dateMar 15, 1988
Priority date
Expiry dateMar 5, 2007

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG01R1/18
  • WIPO fieldMeasurement
  • WIPO sectorInstruments

Abstract

A multipoint microwave coaxial probe card which has a printed circuit (20) with an edge connector (24) and a mounting ring (30) attached to the surface. A series of ceramic stripline needle assemblies (38) are bonded to the board around a hole (22) in the center of the board for compliance with the pads on the component under test. Microwave connectors (34) are mounted into the ring with coaxial cable (42) electrically connecting to the needle assemblies. A portion of the needle assemblies are joined to the edge connector by insulated wires (44) allowing both high and low frequency signals to be utilized simultaneously. A shield in the form of a flat plate (48), with a cover (54), enclose the ring and provide RFI and EMI shielding. The coaxial probe card fulfills the need to provide shielded dual frequency testing of microwave semi-conductor wafers heretofore unavailable.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.