Method and apparatus for low pressure testing of a solid state pressure sensor
US4733553A · kind A · utility
7Cited by
2References
4Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Aug 25, 1986 |
| Grant date | Mar 29, 1988 |
| Priority date | — |
| Expiry date | Aug 25, 2006 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01L27/005
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
The present invention consists of a miniature vacuum chamber that is capable of testing individual dice prior to packaging. The upper portion of the chamber consists of a housing having testing probes and a vacuum inlet disposed therein. The lower portion of the chamber consists of a chuck that holds a wafer and a lower vacuum chamber. The lower portion is indexed to place a dice in contact with the probes. The upper and lower portions then form a seal and a vacuum is drawn in the area defined by the upper and lower chambers. The dice is then tested; the area pressurized; and the chuck indexed to test the next dice.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.