Patent · US Expired

Production of shaped articles of ultra-pure silicon

US4734297A · kind A · utility

11Cited by

15References

12Claims

0Family size

Assignee

Rhone-Poulenc Specialities Chimiques · FR

Inventors

Serge Jacubert · Viroflay, FR
Bernard Boudot · Paris, FR
Philippe Nataf · Ville-d'Avray, FR

Key dates

Filing date	Oct 30, 1985
Grant date	Mar 29, 1988
Priority date	—
Expiry date	Oct 30, 2005

Classification

Technology area (CPC C)Chemistry; Metallurgy
CPC primaryC01B33/035
WIPO fieldMaterials, metallurgy
WIPO sectorChemistry

Abstract

Shaped articles, e.g., bars, of semiconductor-grade, ultra-pure silicon, are facilely and efficiently produced by thermally decomposing/pyrolyzing a monosilane feedstream on a red-heated silicon support member, whereby high purity silicon is deposited thereon, and then recycling the majority of the by-product reaction admixture into said monosilane feedstream.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.