Carrier system for clean room
US4735548A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Apr 20, 1987 |
| Grant date | Apr 5, 1988 |
| Priority date | — |
| Expiry date | Apr 20, 2007 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S414/137
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A carrier system which carries electronic parts mounted on an arm to arbitrary positions within a clean room is disclosed. This carrier system is arranged such that: a screw shaft is perpendicularly provided in a rotationally drivable manner between an upper plate and a bottom plate which are vertically connected through a plurality of guide bars to each other; a movable plate is so disposed as to be vertically movable by the rotation of the screw shaft and is guided by the guide bars in a vertically slidable manner between the upper plate and the bottom plate; a cylindrical member is perpendicularly so provided on the movable plate as to be rotationally drivable which penetrates the upper plate and protrudes upwards; a horizontal moving member is fixed to an upper end of the cylindrical member; a carriage equipped with the arm is so disposed as to be horizontally movable on the horizontal moving member; and a driving wire spanned between pulleys which are axially supported within the horizontal moving member is secured to the carriage. Hence, it is feasible to carry the electronic parts like a silicon wafer in three dimensions within the clean room and to transfer the electronic p…
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.