Method for fabricating hybrid optical integrated circuit
US4735677A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Apr 2, 1987 |
| Grant date | Apr 5, 1988 |
| Priority date | — |
| Expiry date | Apr 2, 2007 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B2006/12109
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A method for fabricating a hybrid optical integrated circuit having a high-silica glass optical waveguide formed on a silicon substrate, an optical fiber and an optical device coupled optically to the optical waveguide, and an optical fiber guide and an optical device guide on the substrate for aligning the optical fiber and the optical device at predetermined positions, respectively, relative to the optical waveguide. Islands carrying electrical conductors are disposed on the substrate. A first electrical conductor film is formed on the substrate. Second electrical conductor films are formed on the top surfaces of the optical waveguide, the optical fiber guide, the optical device guide and the islands and are electrically isolated from the first electrical conductor film. An electrical conductor member is provided to feed electric power from the first and second electric conductor films to the optical device which needs the power supply. The optical waveguide, the optical fiber guide, the optical device guide and the islands are formed from the same high-silica glass optical waveguide film. Alignment of various portions is facilitated when assembling the circuit. A high coupling e…
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.