Oxime sulfonates containing reactive groups
US4736055A · kind A · utility
36Cited by
9References
10Claims
0Family size
Assignee
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Key dates
| Filing date | Apr 11, 1986 |
| Grant date | Apr 5, 1988 |
| Priority date | — |
| Expiry date | Apr 11, 2006 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC07C2603/18
- WIPO fieldOrganic fine chemistry
- WIPO sectorChemistry
Abstract
Oxime sulfonates of formula I ##STR1## wherein Y is a polymerizable unsaturated group or epoxide group or an --OH, --NHR.sup.5, --COOH, COOR.sup.6, --COCl, --CH.sub.2 Hal, --SO.sub.2 Cl or --NCO group, Z is an (x+y)-valent connecting member, R.sup.1 and R.sup.2 are monovalent organic radicals, m is 0 or 1, x is 1 or 2 and y is 1 or 2, can be converted into polymers which can be thermally or photochemically dissociated to form free sulfonic acid groups. Said polymers can therefore be used as photoresists which can be developed with aqueous alkalis.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.