Absolute fluid pressure sensor
US4739664A · kind A · utility
12Cited by
6References
7Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Feb 20, 1987 |
| Grant date | Apr 26, 1988 |
| Priority date | — |
| Expiry date | Feb 20, 2007 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01L9/0022
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A pressure sensor uses two fluidically coupled piezoelectrically driven, vibrating cantilever structures, each tuned to the same fundamental resonance frequency. One cantilever, the driver, is electrically driven at resonance and at constant vibrational amplitude. The other cantilever, the receiver, responds due to the gaseous coupling and generates an output signal proportional to pressure.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.