Patent · US Expired

Method of and apparatus for detecting foreign substances

US4740079A · kind A · utility

52Cited by
2References
9Claims
0Family size

Assignee

Inventors

Key dates

Filing dateOct 28, 1985
Grant dateApr 26, 1988
Priority date
Expiry dateOct 28, 2005

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG01N2021/4721
  • WIPO fieldMeasurement
  • WIPO sectorInstruments

Abstract

The present invention provides a method for detecting foreign substances which detects a foreign substance with a first photoelectric conversion element by emphasizing the foreign substance and detects a background on the object with a second photoelectric conversion element by emphasizing the background and detects a foreign substance detection signal obtained from the first photoelectric conversion element by emphasizing the signal with a detection signal obtained from the second photoelectric conversion element.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.