Method of and apparatus for detecting foreign substances
US4740079A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Oct 28, 1985 |
| Grant date | Apr 26, 1988 |
| Priority date | — |
| Expiry date | Oct 28, 2005 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2021/4721
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
The present invention provides a method for detecting foreign substances which detects a foreign substance with a first photoelectric conversion element by emphasizing the foreign substance and detects a background on the object with a second photoelectric conversion element by emphasizing the background and detects a foreign substance detection signal obtained from the first photoelectric conversion element by emphasizing the signal with a detection signal obtained from the second photoelectric conversion element.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.