Energy intensive surface reactions using a cluster beam
US4740267A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Feb 20, 1987 |
| Grant date | Apr 26, 1988 |
| Priority date | — |
| Expiry date | Feb 20, 2007 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S438/961
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
Chemical reactions are accomplished at a surface of a substrate by supplying both a chemical reactant and energy by means of a cluster beam of a volatile material. Discrete units containing a volatile reactant are formed into clusters, ionized, accelerated to high energy, and impacted against the surface. The clusters disintegrate, and the reactant species reacts at the surface, under the influence of the energy transferred by the accelerated cluster. The clustered species may be the only reactant, as in a decomposition reaction, or additional reactants may be supplied from the surface or from other external sources, as in a film deposition, etching reaction, or catalysis reaction.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.