Secondary ion mass spectrometer
US4740697A · kind A · utility
7Cited by
5References
14Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Oct 18, 1985 |
| Grant date | Apr 26, 1988 |
| Priority date | — |
| Expiry date | Oct 18, 2005 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J49/142
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
In a secondary ion mass spectrograph, the electrical power supply voltages controlling and pertaining to the polarity of the target secondary ions are all switched between opposite polarities simultaneously while the deflection of the primary ion beam is automatically corrected for any error that may result from the polarity switch-over. This allows quick alternation of the polarity of target ions without loss of accuracy of the primary beam scan. The correction to the primary beam deflected may be predetermined under specific observing conditions or may be derived from theoretical considerations.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.