Vibrating accelerometer-multisensor
US4744249A · kind A · utility
73Cited by
39References
10Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Jul 10, 1986 |
| Grant date | May 17, 1988 |
| Priority date | — |
| Expiry date | Jul 10, 2006 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01P2015/0828
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A vibrating multisensor, each using two accelerometers which are vibrated along straight lines perpendicular to their sensing axes. In one embodiment, the sensing axes are co-linear, and in another embodiment the sensing axes are perpendicular. The accelerometers preferably use a proof mass and flexure suspension made on a silicon wafer sandwiched between two other wafers that carry electrodes both for sensing displacement and forcing of the central accelerometer wafer.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.