Method and device for exciting a plasma using microwaves at the electronic cyclotronic resonance
US4745337A · kind A · utility
Assignees
Inventors
Key dates
| Filing date | Jun 5, 1986 |
| Grant date | May 17, 1988 |
| Priority date | — |
| Expiry date | Jun 5, 2006 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH05H1/46
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
Method and device for exciting a plasma using microwaves at the electronic cyclotronic resonance. The device for exciting a gaseous medium by microwaves comprises at least a co-axial structure for introducing the microwave power inside a multipolar confinement structure and at least one antenna coupled to said co-axial structure for the localized introduction of the microwave energy inside said multipolar magnetic confinement structure which comprises a set of permanent magnets creating a network of surfaces having a constant magnetic field and presenting locally an intensity which corresponds to the electronic cyclotronic resonance, and said antenna being positioned on said network of surfaces of constant magnetic field in an area of intensity corresponding to the electronic cyclotronic resonance. The invention finds an application in the creation of a homogenous, isotropic plasma of large volume and high density, which is free of fields in the area of use.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.