Patent · US Expired

Induction heating coil for the floating zone pulling of crystal rods

US4749837A · kind A · utility

6Cited by

2References

8Claims

0Family size

Assignee

Wacker Chemitronic Gesellschaft · DE

Inventors

Wilfried von Ammon · Burghausen, DE
Heinz Klinger · Altötting, DE

Key dates

Filing date	Feb 4, 1987
Grant date	Jun 7, 1988
Priority date	—
Expiry date	Feb 4, 2007

Classification

Technology area (CPC H)Electricity
CPC primaryH05B6/362
WIPO fieldElectrical machinery, apparatus, energy
WIPO sectorElectrical engineering

Abstract

An induction heating coil for a zone pulling of semiconductor rods assures the disturbance-free performance of the pulling process even at the high power densities required for large rod diameters (approximately 10 to 12 cm). According to the invention, the arc-over paths between surfaces in the region of the coil slot, which are at differing potentials, are covered by one or more movable planar structures of temperature-stable insulating material which are introduced into the coil slot.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.