Process for making silicon from halosilanes and halosilicons
US4751067A · kind A · utility
Inventor
Key dates
| Filing date | Nov 18, 1986 |
| Grant date | Jun 14, 1988 |
| Priority date | — |
| Expiry date | Nov 18, 2006 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB01J2219/0272
- WIPO fieldMaterials, metallurgy
- WIPO sectorChemistry
Abstract
A reactor apparatus (10) adapted for continuously producing molten, solar grade purity elemental silicon by thermal reaction of a suitable precursor gas, such as silane (SiH.sub.4), is disclosed. The reactor apparatus (10) includes an elongated reactor body (32) having graphite or carbon walls which are heated to a temperature exceeding the melting temperature of silicon. The precursor gas enters the reactor body (32) through an efficiently cooled inlet tube assembly (22) and a relatively thin carbon or graphite septum (44). The septum (44), being in contact on one side with the cooled inlet (22) and the heated interior of the reactor (32) on the other side, provides a sharp temperature gradient for the precursor gas entering the reactor (32) and renders the operation of the inlet tube assembly (22) substantially free of clogging. The precursor gas flows in the reactor (32) in a substantially smooth, substantially axial manner. Liquid silicon formed in the initial stages of the thermal reaction reacts with the graphite or carbon walls to provide a silicon carbide coating on the walls. The silicon carbide coated reactor is highly adapted for prolonged use for production of highly pu…
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.