Device for measuring the thickness of thin metallic layers deposited on a conductive support
US4752739A · kind A · utility
24Cited by
9References
1Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Oct 24, 1985 |
| Grant date | Jun 21, 1988 |
| Priority date | — |
| Expiry date | Oct 24, 2005 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01B7/023
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A method and apparatus for measuring the thickness of thin metallic layers deposited on a conductive support, wherein the thickness is determined from the measurement of the losses corresponding to the Joule effect, due to the eddy currents which appear when a magnetic circuit excited by an alternating voltage is brought close to the metallic surface.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.