Multilayer ceramic coatings from metal oxides for protection of electronic devices
US4753855A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Dec 4, 1986 |
| Grant date | Jun 28, 1988 |
| Priority date | — |
| Expiry date | Dec 4, 2006 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L2924/19041
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
This invention relates to materials produced by diluting in a solvent a preceramic mixture of a hydrogen silsesquioxane resin and a metal oxide precursor selected from the group consisting of an aluminum alkoxide, a titanium alkoxide, and a zirconium alkoxide. The preceramic mixture solvent solution is applied to a substrate and ceramified by heating. One or more ceramic coatings containing silicon carbon, silicon nitrogen, or silicon carbon nitrogen can be applied over the ceramified SiO.sub.2 /metal oxide coating. A CVD or PECVD top coating can be applied for further protection. The invention is particularly useful for coating electronic devices.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.