Microwave component mounting
US4754243A · kind A · utility
8Cited by
5References
19Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jan 21, 1986 |
| Grant date | Jun 28, 1988 |
| Priority date | — |
| Expiry date | Jan 21, 2006 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L2924/0002
- WIPO fieldBasic communication processes
- WIPO sectorElectrical engineering
Abstract
A method of making a microwave semiconductor component and concurrently forming therewith a mounting membrane adapted for positioning the semiconductor component in an RF transmission medium such as a waveguide. Substantially concurrently with the deposition of a metallic film in connection with forming a semiconductor elements, there is deposited a metallic membrane on the base silicon substrate and outside of the circuit element. The outer periphery of the base substrate is removed to expose the membrane. The metallic membrane is preferably of gold.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.