Patent · US Expired

Cryopump, and a method for the operation thereof

US4757689A · kind A · utility

41Cited by

4References

29Claims

0Family size

Assignee

Leybold-Heraeus GmbH · DE

Inventors

Werner Bachler · Rösrath, DE
Hans-Joachim Forth · Neunburg vorm Wald, DE
Hans-Hermann Klein · Hürth, DE
Wilhelm Strasser · Bensberg, DE

Key dates

Filing date	Oct 22, 1986
Grant date	Jul 19, 1988
Priority date	—
Expiry date	Oct 22, 2006

Classification

Technology area (CPC Y)Emerging Cross-Sectional Technologies
CPC primaryY10S417/901
WIPO fieldEngines, pumps, turbines
WIPO sectorMechanical engineering

Abstract

The invention relates to a cryopump having a casing (1), a gas inlet opening (8) to which a chamber (30) can be attached through a valve (31), a vacuum pump (18) connected through a valve (16) to the casing, a two-stage refrigerator (4) in the casing as cold source, and pumping surfaces (7, 9, 12, 13) which, on both of the refrigeration stages (5, 11) of the refrigerator, are equipped with an electrical heating means (23, 24). To achieve a great shortening of the time required for regeneration and start-up it is proposed that a sensor (41) be provided to monitor the pressure within the pump casing, and that a control unit (28) be present by which the operation of the cryopump can be monitored and controlled on the basis of the signals supplied by the sensor.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.