Blend of solvent and arylsiloxane interlayer dielectric materials
US4758620A · kind A · utility
3Cited by
3References
5Claims
0Family size
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Key dates
| Filing date | Jul 2, 1987 |
| Grant date | Jul 19, 1988 |
| Priority date | — |
| Expiry date | Jul 2, 2007 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC08J2383/04
- WIPO fieldMacromolecular chemistry, polymers
- WIPO sectorChemistry
Abstract
Striation-free interlayer dielectric films of good reflectivity are formed by spin-coating a solution comprising 1,2,4-trimethylbenzene solvent containing a dissolved arylsiloxane oligomer or polymer capable of forming an interlayer dielectric film.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.