Wavelength scanning interferometry and interferometer employing laser diode
US4759628A · kind A · utility
17Cited by
2References
11Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Feb 5, 1986 |
| Grant date | Jul 26, 1988 |
| Priority date | — |
| Expiry date | Feb 5, 2006 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01J3/45
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
In an interferometry wherein a light beam from a light source is divided in two, one of which is used as a reference beam and the other beam is used as an inspecting beam, and the two beams are projected again on an identical plane so as to form an interference pattern; a wavelength scanning type laser diode interferometry characterized in that a laser diode is employed as the light source, and that an injection current of the laser diode is modulated thereby to scan a wavelength of the laser diode and to change an intensity distribution of the interference pattern.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.