Ion source
US4760262A · kind A · utility
15Cited by
4References
24Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | May 12, 1987 |
| Grant date | Jul 26, 1988 |
| Priority date | — |
| Expiry date | May 12, 2007 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J27/08
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
An ion source (10) of the side-extraction hot cathode type in which the inherent drift of electrons toward the positive side of the cathode is minimized by the addition of auxiliary electrodes (31, 32) which surround the cathode (14) at the ends of the anode (12). The electrodes are electrically isolated from the cathode and anode, and various means are provided to apply a potentials to the electrodes, including interconnecting the electrodes, cross-connecting the electrodes to opposite ends of the cathode, and biasing the electrodes at fixed potentials with respect to the cathode, anode or ground.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.