Valve incorporating wafer handling arm
US4764076A · kind A · utility
370Cited by
10References
12Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Apr 17, 1986 |
| Grant date | Aug 16, 1988 |
| Priority date | — |
| Expiry date | Apr 17, 2006 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S414/14
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A valve for a wafer processing machine is formed with a wedge-shaped sliding gate. A folded wafer handling arm is stored within the wedge and pumped to keep the arm clean while the valve is closed.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.