Resonant sensor and method of making same
US4764244A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Jun 11, 1985 |
| Grant date | Aug 16, 1988 |
| Priority date | — |
| Expiry date | Jun 11, 2005 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T29/49103
- WIPO fieldBasic communication processes
- WIPO sectorElectrical engineering
Abstract
Microminiature resonant sensor structures are prepared according to micromachining/microfabrication techniques, which structures include thin-film deposits of piezoelectric materials. Such piezoelectric deposits may be excited electrically by including metallized conductive paths during fabrication, or optically. The resonant frequency of the sensor structure is varied by subjecting it to a physical variable, or measurand, such as pressure, temperature, flow rate, etc. Similarly, the resonant frequency of the devices may be detected electrically or optically. The microminiature resonant structures include ribbons and wires, hollow beam and cantilevered hollow beams, and single- and double-ended double beam resonant structures such as tuning forks.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.