Apparatus for inspecting the surface of a material
US4764969A · kind A · utility
52Cited by
3References
9Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jan 27, 1987 |
| Grant date | Aug 16, 1988 |
| Priority date | — |
| Expiry date | Jan 27, 2007 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG06T2207/30148
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An apparatus for inspecting the surface of a material having a first inspection section for inspecting the wide surface condition of a material with an analysis, a second inspection section for inspecting specific position's conditions of the surface of the material with finer analysis than that of the first inspection section, and a controller for controlling an inspecting position of the second inspection section to inspect an unusual position after the first inspection section finds the unusual position.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.