Transporting device with roller systems for vacuum-coating installations
US4765273A · kind A · utility
Assignee
Inventor
Key dates
| Filing date | Sep 26, 1986 |
| Grant date | Aug 23, 1988 |
| Priority date | — |
| Expiry date | Sep 26, 2006 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S414/135
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
Transporting device for vacuum coating installations with several stations and with roller systems (3, 4) for the guidance and advance of essentially two-dimensional substrate holders (1) in a vertical position along a given transporting path through the stations. To avoid interference with the coating process by falling layer material, the substrate holders (1) are guided exclusively in the area of their lower edge (2) by roller systems (3, 4). In a preferred example of the operation, guide rollers are disposed in pairs in the area of the lower edge (2) of the substrate holders (1), the substrate holder (1) being held between said guide rollers. The guide rollers (5, 6) are rotatable about vertical axes A1, A2.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.