Energy ray curing of arylsiloxane/silicate compositions and subsequent etching thereof
US4765866A · kind A · utility
1Cited by
4References
8Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Sep 28, 1987 |
| Grant date | Aug 23, 1988 |
| Priority date | — |
| Expiry date | Sep 28, 2007 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/02348
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
The etching of cured arylsiloxane/silicate resin coatings with HF is improved if the curing of said coatings, prior to etching, comprises curing with energy ray irradiation.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.